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MATERIALS FOR SEMICONDUCTOR & OPTICS (SPUTTERING TARGETS)

Sputtering target materials are used for semiconductors, LCD displays, discs for magnetic hard drives, sensors, superconductors and other applications.

Sputtering Targets

Oxides
Ta2O5, Al2O3, SnO2, In2O3, WO3, SiO2, SiO
Oxide Compounds
ITO, ATO, Y2O3-ZrO2
Alloy
IT, AT, Co-Cr, Ni-Cr, Cr-Si
Metal
W, Mo, Ta, Nb, V, Ti, Si, Cr, Ni, Co, Fe, Ge
Intermetallics & Others
TiSix, WSix, TaSix, MoSix, Si3N4, SiC, AIN, TaN, Tb-Fe, ZnSe, ZnS-Mn
Superconductor Materials
SrTiO3, LaAIO3, LaGaO3, MgO, Y:ZrO2, NdGaO3, LSAT